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It is significant that these two units of measure are useful in describing the development of the shape of an etched part. It is desirable that U be minimized and F maximized for best feature definition. 34.7.3.2 Undercut and Etch Factor Development. The development of trace shapes has been studied by observing etched traces at progressive times.36,37 This allows one more parameter to be developed, the extent of etch, which is the ratio of R/B. This factor equals 1.0 when the bottom of the trace equals the resist width, one measure of ideal etching. Note that if R < B, this implies that the trace is underetched, and R > B indicates overetching. The traces were etched in cupric chloride using 3.0-mil line and space patterns of 1.0-mil resist on 1-oz (1.4-mil) copper foil. The progression of etch values is found in Table 34.2 and Fig. 34.5.

TABLE 34.2 Etch Progression Etch time, S 90 110 125 140 165 Undercut, U mil 0.05 0.30 0.45 0.525 0.75 Etch factor, F 0.90 1.75 2.33 2.67 3.11 Extent of etch, R/B 0.5 0.75 1.1 1.0 1.25

There is an important conclusion to be drawn from these data In order to compare or characterize an etch process (etcher to etcher, etchant to etchant, condition to condition, etc), it is not sufficient to only use the undercut or etch factor alone The data must be evaluated at a given R/B point for the same foil, resist, artwork, and panel size If these factors are not held constant, the statement that process A gives less undercut has little meaning additional etching gives more undercutting and straighter side walls 34733 Sensitivity Analysis One of the extensions of the previous analysis is the ability to evaluate the sensitivity of the process This is a study of the change in the result (R/B) due to the additional etching (relative time).

Relative time is the ratio of the actual etching time to the nominal etch time taken to reach R/B of 10 In Table 342, it took 140 s to reach R/B = 1, but only 25 s (18 percent) more etching to achieve 25 percent overetching (R/B = 125) This sensitivity indicates that a small amount of overetch time could cause overetched 3-mil circuits In this example, the etching process is slow enough to be controlled with the adjustment of the conveyor speed in the etcher However, if the etchant were twice as fast (alkaline, for example) with the same sensitivity, it would be difficult to accurately dial in the proper result Further evaluation of the cumulative variation from several variable properties on the overall product capability statistics can be found in the literature38 34734 Implication for Improved Processes.

of course the book is aimed at physicists and astronomers who want to learn the theory The truth is that relativity looks much harder than it is There is a lot to learn, but once you get comfortable with the new math and new notation, you will actually nd it a bit easier than many other technical areas you have studied in the past This book is meant to be a self-study guide or a supplement, and not a fullblown textbook As a result we may not cover every detail and will not provide lengthly derivations or detailed physical explanations Those can be found in any number of ne textbooks on the market Our focus here is also in demystifying the mathematical framework of relativity, and so we will not include lengthly descriptions of physical arguments.

As a practical process application, it is often desirable to improve the etch factor to get a more square shape of the etched profile One method for accomplishing this is to design the phototool for wider lines than desired, and then overetch to the desired endpoint This practice increases F at the expense of also increasing U However, as spaces get smaller, there is no space available for additional resist linewidth, because the fluid activity is restricted so that the etchant is stagnant between the traces Therefore, resist width near the final line specification and precise control of the etch process are required to obtain desired shape profiles within the R/B = 1 degree of etching As feature specifications tighten, the process to do this may need to be altered.

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One patented approach is to finish the etch with a specific slower-speed fine-tune etching chemistry to be able to stop the etching process at precisely the correct point39.